Semiconductor Manufacturing Equipment
Materials Technology Associates, Inc, specializes in the failure analysis of semiconductor manufacturing tools beginning with the gas box and the gas distribution systems that include valves filters, regulators, and mass flow controllers. These gas distribution systems feed into the process chambers with their complex system of shower heads, electrostatic chucks, pedestals, to the turbo molecular vacuum pumps for applying vacuum to the chambers.
Extensive experience with
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Deposition tools including PVD, CVD, PECVD, ALD
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Etch tools including metal etch, polysilicon etch, and oxide etch
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Platforms, load-locks, transfer chambers, reaction chambers, and wafer handling
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Ambient and elevated temperature electrostatic chucks and pedestals
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Gas Distribution Systems including monometers, sensors, gas boxes, showerheads, and turbo pumps
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Gas Sticks including valves, regulators, filters, and mass flow controllers
